Optics Fabrication and Metrology at the APS

A.T. Macrander
Experimental Facilities Division

Abstract

The OFM group has as its mission the fabrication and measurement of x-ray optics for APS beamlines. Examples from four areas will be presented: i) fabrication, polishing, and etching of crystal monochromators and analyzers; ii) x-ray topography and x-ray characterization of monochromators and thin film substrates ; iii) thin film deposition for grazing incidence mirrors and multilayer optics; iv) metrology of x-ray optics done without using x-rays. Some specialized optics will be discussed including : diamond monochromators, Kirkpatrick-Baez focusing mirrors, multilayer monochromators, and multiple lens designs that are based on x-ray refraction.

Supported by the U.S. DOE, Office of Science, BES, under contract No. W-31-109-ENG-38.