Program

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PROGRAM

PROGRAM

Wednesday, March 15
Thursday, March 16
Friday, March 17
Posters
Group Discussion Items

Wednesday, March 15, 2000

5:00-7:00 p.m.

Registration
Guest House Lobby

Thursday, March 16, 2000

7:00 a.m.

Registration
APS Lobby

8:00 a.m.

Welcome & Opening Remarks

8:15 a.m.

A Forward Look at Optics and Metrology Needs for Synchrotron Radiation
Malcolm Howells, ALS/LBNL

8:45 a.m.

A Comparison of X-ray Scattering and Profiling Methods for Measuring Surface Roughness
Sunil K. Sinha, APS/ANL

9:15 a.m.

X-ray FEL Radiation Parameters and Optics Needs
John Arthur, SLAC/SSRL

9:45-10:15 a.m.

Break @ Vendor Exhibits

10:15 a.m.

Limits of Interferometric Measurement of Figure Error
Christopher Evans, NIST

10:45 a.m.

Nanometric Precision Interferometry: Theory and Reality
Raymond Mercier, Institut d'Optique-Orsay

11:15 a.m.

Overview of Surface Roughness Metrology Instruments
Theodore V. Vorburger, NIST

11:45 a.m.

Beamline Wavefront Analysis and Optimization
Olivier Hignette, ESRF

12:15-1:30 p.m.

Lunch @ Vendor Exhibits, Posters

1:30 p.m.

Long Trace Profiler Performance Issues
Peter Z. Takacs, BNL

2:00 p.m.

Subnanometer Accuracy Measurements with the LTP at BESSY
Heiner Lammert, BESSY

2:30 p.m.

New Concepts for Determining Slope and Figure from Measurements of Slope Difference or Curvature
Ingolf Weingärtner, PTB-Germany

3:00-3:15 p.m.

Break @ Vendor Exhibits

3:15-5:00 p.m.

Informal Presentations & Discussions

Optical Considerations for the Long Trace Profiler: Required Camera Resolution
Steven Irick, ALS/LBNL

Measurements of Surface Diffraction Gratings and Groove Spacing by means of LTP
Daniele Cocco, Sincrotrone Trieste

Group Discussion

5:30 p.m.

Bus to Banquet

6:30 p.m.

Reception Followed by Dinner
Signature Room, 95th Floor, John Hancock Bldg., Chicago, IL

Friday, March 17, 2000

8:00 a.m.

Metrology of Multilayers Optics
Albert Macrander, APS/ANL

8:30 a.m.

Overview of SNS Status and Instrumentation
R.K. Crawford, SNS/ORNL

9:00 a.m.

Optics Needs and Requirements for Neutron Sources
Michael Agamalian, SNS/ORNL

9:30 a.m.

Polarized Neutron Optical Devices for the New U.S. Spallation Neutron Source
Frank Klose, SNS/ORNL

10:00-10:15 a.m.

Break @ Vendor Exhibits

10:15 a.m.

Development Status of a Long Trace Profiler at LURE
Francois Polack, LURE-Orsay

10:45 a.m.

Design, Development and Building of a Long Trace Profilometer for the Metrology of X-Ray Mirrors
A.K. Saxena, Indian Institute of Astrophysics, India

11:15 a.m.

Metrology Instrumentation at ESPCI
Arnaud Dubois, ESPCI-Paris

11:45 a.m.

Use of Stitching Interferometry for the metrology for X-ray and Neutron Mirrors
Michael Bray, MB Optique-France

12:15-1:30 p.m.

Lunch at Bldg. 402 Exhibition Hall
APS Tour

1:30-5:00 p.m.

Informal Presentations & Discussions

LTP Metrology at ELLETRA: Some Experiences
Giovanni Sostero, Sincrotrone Trieste

Mirror Measurement Experience with the LTP at the APS
Lahsen Assoufid, APS/ANL

Preliminary Experiment for a Large Field Atomic Probe Scanning Microscope with Novel Laser
Deming Shu, APS/ANL

How Should We Specify Hard X-ray Reflective Optics?
Olivier Hignette, ESRF

Group Discussion

5:00 p.m.

Summary & Closing Remarks

POSTERS

Ten Years of Mirror Metrology at the ESRF: A Review
Amparo Rommeveaux, ESRF

Portable LTP Concept and Solution
Shinan Qian, Peter Takacs, Giovanni Sostero, Daniele Cocco, BNL

Scanning Surface Metrology at Carl Zeiss: High Precision 3D-Coordinate Measuring Device M400
Andreas Seifert, ZEISS

Metrology of APS Mirrors
Peng Her, APS/ANL

GROUP DISCUSSION ITEMS

1.	General metrology issues
	a)	Evaluation of current situation and assessment of future needs
		-	What are our current requirements?
		-	Optics requirements for third-generation synchrotrons, FELs, and neutron sources
		-	How are our metrology requirements different from other optical applications?
	b)	Choices of instruments for analyzing large mirror surfaces at spatial periods smaller than one micron
		-	Commercially available choices (AFM, SEM)
		-	Lab instruments (EUV R, x-ray BRDF)
2.	Long trace profilers (LTPs)
	a)	Evaluation of current LTPs
	b)	Error sources - random and systematic
	c)	Current accuracy is 0.1 arcsec rms. How to get 0.01 arcsec rms?
	d)	Are there natural limitations to this kind of profilometry?
	e)	What are the current technological limits?
	f)	Standardization issues, round robins
	g)	Data acquisition and analysis software packages, and operating systems
	h)	Environment control
	i)	Nonconventional measurement techniques with the LTP (bender calibration and characterization, characterization of mirrors deflecting sideways or downward, ellipse bending optimization, etc.)
	j)	Calibration and measurement procedures, data reporting, and data interpretation (e.g., "detrending")
	k)	Third-generation LTP (LTP III)
		-	Overall configuration, probe beam path
		-	Computer data acquisition & operating systems
	l)	New concepts for long trace profilometry
3.	Other techniques and issues
	a)	Slope measurement vs. height measurement techniques
	b)	Competing schemes like the Bauer curvature measurement approach
	c)	Commercial boxes that might be scanned over an optic (e.g., laser interferometers)
	d)	Special methods for gratings
	e)	3-D mapping strategies
	f)	Software customization (e.g., for ellipse bending optimizations)
	g)	In situ mirror measurements
	h)	Instrument integration
		-	Instrument-independent analysis programs. PSD, histograms, 2D, 3D, slope surfaces, height surfaces, etc.
		-	Commercially available software packages
		-	In-house developed/publically available software packages
		-	Measuring and reporting radius of curvature of long, grazing-incidence mirrors